Self calibration devices for chemical and bio analytical trace detection systems

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Patent Identifier: 
8051697

The present invention relates to chemical and bioanalytical sensors and sensor systems, particularly to systems incorporating a calibration device for sensors where the calibration device is comprised of an array of micromachined MEMS structures and materials for trapping and retaining calibrant or interferant materials until they are needed and released quantitatively using structure operatively associated with the array.